陶瓷二次金属化镀镍层厚度的无损检测  

Non-destructive test for thickness of secondarily metallized nickel coating on ceramics

作　　者：曾敏[1] 伍智[1] 金大志[1] 杨卫英[1] 李蓉[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《真空》2006年第5期47-49,共3页Vacuum

摘　　要：本文分析了陶瓷-金属封接中二次金属化镀层厚度对陶瓷-金属封接质量的影响，提出采用X射线荧光光谱法（XRF）对二次金属化镀层厚度进行无损检测，分析了二次金属化镀层成分与含量，对二次金属化镀层的底材进行SEM分析，进行了检测用标准片的设计和标定，建立了XRF无损检测厚度方法的应用程序和校准方法。研究结果表明：采用X射线荧光光谱法，对二次金属化镀层厚度进行无损检测是可行的和可靠的；在试验的范围内（2．48-10．5μm），测量误差小于2％，RSD（相对标准偏差）小于2％。Discusses the effect of the thickness of secondarily metallized nickel coating on the ceramics-to-metal sealing quality. Proposes using XRF（X-ray fluoroscopy） as a non-destructive testing method to measure the thickness of secondarily metallized coating, with standard samples designed and calibrated to analyze both qualitatively and quantitatively the nickel coating composition and for SEM observation of substrate surface. Formulates the corresponding application program and calibration system. The results show that XRF is available and reliable to the non-destructive testing for the thickness of secondarily meatallized coating, by which the measuring error and RSD （relative standard deviation are both less than 2 % within the measuring range from 2.48 to 10. 5μm.

关 键 词：陶瓷金属化 镀层厚度 无损检测 

分 类 号：TN105.3[电子电信—物理电子学] TG17[金属学及工艺—金属表面处理]