X7R型MLCC流延瓷膜显微结构的AFM研究  

Study on the Green Tapes Microstructure of X7R-type MLCC by Atomic Force Microscopy

作　　者：马丽丽[1] 包生祥[1] 彭晶[1] 戴林杉[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,四川成都610054

出　　处：《分析测试学报》2006年第5期73-76,共4页Journal of Instrumental Analysis

基　　金：国防科工委共性项目支持

摘　　要：针对多层陶瓷电容器流延瓷膜在迭片压片工艺中发生的起泡现象,利用原子力显微镜作为研究手段,分析对比了自制和进口流延瓷膜的微观结构差异,结果表明,瓷膜起泡的原因为瓷膜浆料中的粘结剂过多所致。根据分析结果提出了调节粘瓷比及调整流延工艺参数的建议,实践效果良好。To elucidate the bubbling phenomena occurred in the home-made green tapes during the laminated process of MLCC, the difference of the microstructures between the home-made and the imported green tapes was studied with atomic force microscopy（AFM）. Experimental results revealed that the difference was due to the presence of large amount of PVB binder in the ceramic slurry. Satisfactory results were obtained by adjusting the ratio of ceramic powder to PVB binder and by improving the parameters of tape-casting process. This paper compared the difference in microstructures between home-made and imported green tapes with atomic force microscopy （AFM） for the cause of bubbling of the home-made green tapes when they were laminated into MLCC. Results revealed that there were too much PVB binder in the ceramic slurry. According to the analysis we suggested that it would be better to adjust the proportion of ceramic powder with PVB binder and improve the parameters of tape-casting processing, experiment results significantly favored the processing of MLCC.

关 键 词：多层陶瓷电容器 微观结构 原子力显微镜(AFM) 流延 瓷膜 

分 类 号：O766.1[理学—晶体学]