一种检测乙醇浓度的气敏传感器的制作  

Facture of Gas Sensor to Test Alcohol Consistence

作　　者：来五星[1] 王聪[1] 李晓平[1] 史铁林[1] 

机构地区：[1]华中科技大学微系统中心,湖北武汉430074

出　　处：《仪表技术与传感器》2006年第9期8-9,24,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(5040503350575078)

摘　　要：在汽车电子行业,乙醇气敏传感器可用来检测司机的酒精含量,避免事故的发生。因为二氧化锡(SnO2)具有较高的灵敏度、且最高灵敏度对应的工作温度较低、电路简单、造价低廉、使用方便等特点。基于薄膜工艺开发了硅基二氧化锡薄膜为感应薄膜的乙醇气敏传感器,介绍了乙醇气敏传感器的工作原理,在比较两种薄膜结构的基础上,深入探讨硅基二氧化锡薄膜制作工艺,并对薄膜性能进行了定量分析,为乙醇气敏传感器制作提供了一种好的思路。In the automobile electronics industry, alcohol gas sensors could be used to detect drivers and avoid accidents. Because tin dioxide （SnO2） with characteristics of higher sensitivity, the highest sensitivity having correspondingly low working temperature, simple circuit, low cost, user-friendly operation. Develops a process to facture SnO2 film based on the silicon underlay as sensor film of the alcohol gas sensor, in details introduces its principle, on the basis of compare of two film structures, deeply discusses the process to facture SnO2 film based on the silicon underlay, and analysis quantitatively the film feature, put forward a way of facture of alcohol gas sensors.

关 键 词：传感器 乙醇 薄膜 工艺 

分 类 号：TB381[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]