(Pb_(1-x)Srx)TiO_3铁电薄膜电滞回线的测试分析  

FABRICATION AND HYSTERESIS LOOPS PROPERTY OF(Pb_(1-x)Sr_x)TiO_3 FERROELECTRIC THIN FILMS

作　　者：王茂祥[1] 孙平[1] 

机构地区：[1]南京大学工程管理学院,江苏南京210093

出　　处：《真空与低温》2006年第3期142-144,共3页Vacuum and Cryogenics

基　　金：国家自然科学基金(69671008)

摘　　要：采用磁控溅射法制备了PST薄膜,讨论了其制备工艺并着重对其电滞回线进行了测试分析。从测试结果来看,其饱和极化强度PS典型值为19.0μC+cm2,剩余极化强度为6.6μC+cm2,矫顽场强为16kV+cm,热释电系数为10-4量级。表明所制备的PST薄膜具有较好的铁电性能。The （Pb1-x Srx）TiO3 thin films were prepared by magnetic-sputtering technology. The hysteresis loops property of PST thin films was measured and analyzed. The saturated polarization intensity, the residual polarization intensity and the coercive electric field of the PST sample were about 19.0 μC/cm^2, 6.6 μC/cm^2 and 16 kV/ cm, respectively. The pyroelectric coefficient was in 104 order.

关 键 词：(Pb1-x Srx)TiO3薄膜 磁控溅射 电滞回线 铁电性 

分 类 号：O484.42[理学—固体物理]