干涉仪系统传递函数测量及影响因素的分析  

Measurement of the system transfer function of the interferometer and the analyses of the influence on the measuring

作　　者：邓燕[1] 柴立群[1] 许乔[1] 徐建程[1] 张宁[1] 

机构地区：[1]成都精密光学工程研究中心,成都610041

出　　处：《光学技术》2006年第5期741-743,共3页Optical Technique

摘　　要：波前功率谱密度(PSD)被用于评价惯性约束聚变(ICF)激光驱动器光学元件中频段的波前误差。干涉仪对PSD较高空间频率分量的测量存在失真效应,可通过干涉仪系统传递函数(STF)的检测标定来获得真实的波前PSD分布。采用台阶板位相比较法测得大口径菲索相移干涉仪检测系统在透射和反射检测情形下的传递函数。对传递函数测试算法进行了比较分析,明确了干涉仪系统zoom倍率的改变等因素对传递函数测量的影响,为波前PSD的准确检测奠定了基础。The wavefront power spectral density （PSD） is being adopted for specifying the large optical component employed in high power density solid-state laser for inertial confinement fusion （ICF）. When the phase wavefront is measured by interferometer, there are anarnorphic effects on the wavefront PSD with high spatial frequency. It is necessary to calibrate the system transfer function （STF） of the interfemmeter before one can use the PSD information. The system transfer functions of the transmitted measuring mode and reflective measuring mode for the interferometer were obtained respectively by comparing the theoretical value and the measured value of the PSD of the step phase object. The influences of the algorithms and the system zoom on the measurement of the STF were analyzed, which establish the basis for the accurate measurement of the wavefront PSD.

关 键 词：光学检测 波前功率谱密度(PSD) 系统传递函数(STF) 相位均方根(RMS) 

分 类 号：TN248[电子电信—物理电子学]