光学平面绝对检验方法的研究  

Absolute flatness measurement of optical surfaces

作　　者：徐晨[1] 陈磊[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,南京210094

出　　处：《光学技术》2006年第5期775-778,共4页Optical Technique

摘　　要：应用两种方法对三个高精度平面进行了测试。第一种方法是Fritz的三面互检法,它利用Zernike多项式的特性拟合三个面四次组合测量得到的干涉图,然后求出三个面的Zernike多项式系数,从而得到三个面的面形偏差。第二种方法是奇偶函数法,根据函数的奇偶性,把平面的面形函数分解为四类:偶奇、奇偶、偶偶和奇奇函数,分别求出各分量,从而得到三个面的三维面形偏差。对两种方法都编制了理论模拟和实测程序,并进行了实验,实现了无参考面的高精度平面面形测试。Two methodswere used to testing three high accuracy optical surfaces using a Fizeau interferometer. The properties of Zernike polynomials were utilized to fit data points from four interferograms. Then the Zernike coefficients of three fiats were derived and the absolute distributions of three flats were obtained. The second method was even-odd method. Using the symmetry properties of odd and even functions, a flat was decomposed to four components： even-odd, odd-even, even-even and odd-odd functions, the absolute distribution of three flats were obtained by solving each component. The two methods were programmed for simulation and experiment, and experiments were done to achieve accurate flatness measurement without a reference flat.

关 键 词：光学测量 绝对检验 Fritz的三面互检法 奇偶函数法 

分 类 号：TH744.3[机械工程—光学工程]