声表面波气体传感器器件的设计  

The Design of Surface Acoustic Wave Chemical Gas Sensor

作　　者：付曙霞 杨震夏 朱春来 

机构地区：[1]第七一八研究所,河北邯郫056027

出　　处：《舰船防化》2006年第3期15-19,30,共6页

摘　　要：论述了声表面波气体传感器器件的结构设计及设计参数的选择，设计了ST和AT不同切向的石英晶体材料做压电基片材料的三种振荡器，通过电性能参数的测试，比较了三种振荡器的性能优劣。The paper studied the effects of the SAW chemical warfare detector＇s designing. ST quartz and AT quartz were used for substrate of three types of SAW oscillators. The oscillators were designed, fabricated and tested. We selected the optimized SAW oscillators to be SAW devices through experiments.

关 键 词：声表面波 气体传感器 振荡器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]