Comparison between Double Crystals X-ray Diffraction and Micro-Raman Measurement on Composition Determination of High Ge Content Si_(1-x)Ge_(x) Layer Epitaxied on Si Substrate  

作　　者：Lei ZHAO Yuhua ZUO Buwen CHENG Jinzhong YU Qiming WANG 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences,Beijing 100083, China

出　　处：《Journal of Materials Science & Technology》2006年第5期651-654,共4页材料科学技术（英文版）

基　　金：This work is supported by the National Natural Science Foundation of China （Grant Nos. 60336010 ＆ 90401001）;973 Program （Grant No. TG 2000036603）;the Student Innovation Program of CAS （No. 1731000500010）.

摘　　要：It is important to acquire the composition of Si1-xGex layer, especially that with high Ge content, epitaxied on Si substrate. Two nondestructive examination methods, double crystals X-ray diffraction （DCXRD） and micro-Raman measurement, were introduced comparatively to determine x value in Si1-xGex layer, which show that while the two methods are consistent with each other when x is low, the results obtained from double crystals X-ray diffraction are not credible due to the large strain relaxation occurring in Si1-xGex layers when Ge content is higher than about 20%. Micro-Raman measurement is more appropriate for determining high Ge content than DCXRD.It is important to acquire the composition of Si1-xGex layer, especially that with high Ge content, epitaxied on Si substrate. Two nondestructive examination methods, double crystals X-ray diffraction （DCXRD） and micro-Raman measurement, were introduced comparatively to determine x value in Si1-xGex layer, which show that while the two methods are consistent with each other when x is low, the results obtained from double crystals X-ray diffraction are not credible due to the large strain relaxation occurring in Si1-xGex layers when Ge content is higher than about 20%. Micro-Raman measurement is more appropriate for determining high Ge content than DCXRD.

关 键 词：Si1-xGex Ge content Composition determination Double crystals X-ray diffraction （DCXRD） Micro-Raman measurement 

分 类 号：O657.3[理学—分析化学]