电磁激励的硅谐振梁设计和有限元分析  

Design and Finite Element Analysis of a Magnetically Actuated Silicon Resonant Beam

作　　者：潘军[1] 黄庆安[1] 秦明[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2006年第05B期1835-1839,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(60476019)

摘　　要：介绍了电磁激励硅谐振梁的激励和检测原理,给出了双端固支的硅谐振梁谐振频率公式,并利用该公式分析了双端固支梁的谐振频率和梁尺寸的关系.本文利用有限元软件模态分析计算了三种不同的谐振频率情况,并逐一加以比较分析.本文还利用有限元软件对受力弯曲的工字梁做了静态分析,从而得出了在一定磁场力作用下的应力分布图,从而对压敏电阻的设计提供了一定的依据.The actuation and detection principle of a magnetically actuated silicon resonant beam is introduced. The resonant frequency of a clamped-clamped silicon resonant beam is presented. The relation between resonant frequency of the clamped-clamped beam and the beam＇s dimension. Three resonant frequencies using the Finite Element analysis are calculated, and compared with each other. A stress map of H bearing beam is obtained using the Finite Element analysis, which is valuable to the design of a piezoresistor.

关 键 词：谐振频率 电磁激励 双端固支梁 有限元 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]