面向RFIC的片上铁氧体磁膜电感  

On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC

作　　者：杨晨[1] 刘锋[1] 任天令[1] 刘理天[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《传感技术学报》2006年第05B期1930-1933,共4页Chinese Journal of Sensors and Actuators

基　　金：美国自然科学基金资助(0302449);中国自然科学基金资助(90607021)

摘　　要：采用集成工艺制作了片上铁氧体磁膜(Ni0.4Zn0.4Cu0.2Fe2O4,Y2.8Bi0.2Fe5O12和Co7ZrO9)射频微电感.铁氧体薄膜采用溶胶凝胶法制作,高频特性较好,适于片上电感的应用.对电感样品进行了测试和等效电路分析,结果表明,与无磁膜结构相对比,铁氧体磁膜电感显著增强了电感性能,是一种实现小尺寸、高性能片上RFIC电感的很有前景的途径.On-chip RF integrated inductors with kinds of ferrite thin-films （Ni0.4Zn0.4Cu0.2Fe2O4, Y2.8Bi0.2Fe5O12 and Co7ZrO9） have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RF IC.

关 键 词：铁氧体薄膜 电感 射频集成电路 

分 类 号：TN409[电子电信—微电子学与固体电子学]