串联压电微泵特性研究  

Performance of a Serial piezoelectric Micropump

作　　者：崔琦峰[1] 刘成良[1] Xuan F.(William)Zha 

机构地区：[1]上海交通大学机械工程与动力学院 [2]National Institute of Standards and Technology and University of Marylandat College Park Gaithersburg,MD20899,USA

出　　处：《传感技术学报》2006年第05B期1974-1977,1982,共5页Chinese Journal of Sensors and Actuators

摘　　要：介绍了一种压电驱动的串联无阀微泵.基于收缩管/扩展管整流特性的分析,建立了微泵输出特性的表达公式.采用有限元仿真软件ANSYS对微泵内流体的流动过成进行了数值模拟,结果显示,在相同的驱动条件下,串联无阀微泵的工作性能优于单腔无阀微泵的工作性能.泵流量随着驱动电压的增加而增加.当固定的驱动电压下,存在最优的压电层厚度使得泵流量最大.研究结果为串联微泵的优化设计提供了依据.A serial valveless piezoelectric micropump is presented. Based on the flow rectification of diffuser/nozzle elements, the flux properties of serial micropump are obtained. The flow in the valveless micropump is simulated by using ANSYS software. The results show the serial valveless micropump has high performance compared with single chamber valveless micropump under the same exciation voltage. The flow of serial micropump increases with increasing the excitation voltage. There is an optimal piezoelectric thickness for the high pump performance under the fixed excitation voltage. The results are helpful to design the optimal micropump.

关 键 词：串联无阀泵 压电执行器 数值计算 结构优化 

分 类 号：TN86[电子电信—信息与通信工程]