用于血样前处理的BioMEMS微流控芯片  

Bio MEMS Microfluidic Chips for Blood Sample Pretreatment

作　　者：陈兴[1] 崔大付[1] 刘长春[1] 李辉[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100080

出　　处：《传感技术学报》2006年第05B期1991-1995,共5页Chinese Journal of Sensors and Actuators

基　　金：自然科学基金项目资助(60427001和60501020);中国科学院"优秀博士学位论文;院长奖获得者"专项启动资金

摘　　要：基于BioMEMS技术,研制成三种血液样品前处理微流控芯片,分别介绍了血样前处理微流控芯片的原理、结构、制备技术以及样品前处理效果.基于错流过滤原理,设计了用于血细胞分离的错流过滤微结构,采用深刻蚀技术在硅片上刻蚀出直径为20μm,高度为50μm的圆柱阵列;基于化学法破裂细胞,设计了用于血细胞破裂的夹流式微沟道,采用湿法腐蚀技术在硅片上腐蚀出深度约为80μm的微沟道;基于固相萃取原理,设计了用于DNA提纯的介孔固相载体,采用电化学阳极腐蚀技术在硅微沟道内表面制得表面积为300m2/g的介孔层.分别在芯片上实现了血细胞的分离、血细胞的破裂以及DNA的提纯.Three type sample pretreatment microfluicdic chips including cell separation chip, cell lysis chip and DNA extraction chip were developed based on BioMEMS technology. The principles, the structures, the fabricated technology and the sample pretreatment effects of these chips were separately described. Based on the principle of crossflow filtration, cell separation chip was designed, and the silica micro pillar array, 20 μm in diameter and 50 μm high, was fabricated by DRIE. Based on chemical method, a sandwich-type chip for blood cell lysis was designed, and microchannels, 80 μm deep, were fabricated by wet etching technology. Based on solid phase extraction, mesoporous matrix for extracting DNA was designed, and the matrix, whose surface area was about 300m^2/g, was fabricated on the internal surface of the microchannels by electrochemical etching technology. Blood cell separation, blood cell lysing and DNA purification were achieved on the microfluidic chip, respectively.

关 键 词：BIOMEMS 样品前处理 微流控芯片 深刻蚀技术 电化学阳极腐蚀技术 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]