基于激光微加工Al_2O_3微结构Cl_2传感器的制作及性能研究  

The Facture and Performance Study of Cl_2 Sensor Based on Laser Micro-Machining on Al_2O_3 Microstructure

作　　者：施云波[1] 张洪泉 胡竹平[1] 冯桥华[1] 项金娟[1] 郭建英[1] 

机构地区：[1]哈尔滨理工大学测控技术与通讯工程学院,哈尔滨150080

出　　处：《传感技术学报》2006年第05B期2103-2106,共4页Chinese Journal of Sensors and Actuators

基　　金：黑龙江省科技攻关项目资助(GC03A121);国家自然科学基金资助项目(60272002);重大基础研究(973)前期研究专项(2003CCC01100)

摘　　要：以膜厚为250μm的Al2O3膜为微结构基板、95# Al2O3瓷板为微壳结构体，设计并采用激光微加工技术制作了具有Ф0．2mm微孔通道的微结构传感器．阐述了CuCl杂化修饰CuPc的工艺过程，并通过真空镀膜形成气敏膜．实现了主动吸气的检测模式，提高了响应时间和气敏性．通过SEM分析得到了良好的表面形貌和膜尺寸，用做电极和加热器Pt膜厚为500nm，敏感膜厚为150nm，微壳深度为150～200μm测试结果表明对Cl2具有较好的敏感响应，灵敏度为0．01％浓度下0．25倍，并呈现P型半导体的变化规律．研究了通气状态和加热电压对传感器响应和气敏性的影响．Take Al2O3 film of 250 μm in thickness as microstructure＇s base plate, 95# Al2O3 vitrolite as micro shell structural body, adopt laser micro-machining technology, the microstructure sensor which has ФN0.2 mm mipor channel was factured. The craft process of CuCl hybrid ornamenting CuPc was illustrated and the gas sensitive film was formed through vacuum coating. The detecting mode of actively air suction was realized, the response time and gas sensitivity increased. Trough SEM analysis, the better surface appearance and film dimension was attained. Used as electrode and heater, the Pt film is 500 nm in thickness. The sensitive film is 150 nm in thickness. The micro shell is 150～200 μm in depth. The testing result indicates that the sensor has well sensitivity to Cl2, the sensitivity is 0.25 when the density is 0. 01%, appears p type semiconductor＇s changing rule. The impacts of aerating state and heating voltage on the response and the sensitivity were studied.

关 键 词：激光微加工 Al2O3微结构 微壳 Cl2传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN2[自动化与计算机技术—控制科学与工程]