Love波传感器及其质量灵敏度测试  

Love Wave Sensor and the Measurement of Mass Sensitivity

作　　者：胡友旺[1] 史建亮[1] 贾宏光[1] 吴一辉[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处：《传感技术学报》2006年第05B期2126-2129,2134,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(60474055)

摘　　要：为实现流体领域的液相传感,设计并制作了基于36°-YXLiTaO3作为压电衬底、PMMA薄膜作为波导层的Love波传感器;通过微电流电铸实验测量得到Love波传感器的质量灵敏度为-2.281g-1cm2.分析了波导层厚度、器件温度和电铸电极的厚度三个因素对灵敏度的影响,为进一步提高灵敏度提供了参考.For liquid sensing applications in fluid field, Love wave sensors were designed and fabricated on 36°-YX LiTaO3 substrate with PMMA thin film guiding layer. The mass sensitivities of Love wave sensors were measured by electroplating experiment with stable current. The mass sensitivity measures 2. 281g^-1 cm^2. For the farther improvement of sensitivity, the impacts to mass sensitivity of ingredients were analyzed, such as thickness of guiding layer, device temperature and thickness of electroforming cathode.

关 键 词：LOVE波传感器 LITAO3 PMMA 灵敏度 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]