结合LAPS及纳米多孔硅的气体传感器研究  

The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon

作　　者：宗小林[1] 蔡华[1] 余辉[1] 王平[1] 

机构地区：[1]浙江大学生物传感器国家专业实验室

出　　处：《传感技术学报》2006年第05B期2142-2144,共3页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(30570492);浙江省人才基金项目资助(R205505)

摘　　要：结合光寻址电位传感器及纳米多孔硅技术研制了一种新型的气体传感器.该传感器结合光寻址电位传感器的微机电系统工艺和平面器件特点以及纳米多孔硅的高灵敏度特性,对实现进一步细胞代谢气体的检测提供了一种可能的手段.初步实验结果表明,在室温条件下,该气体传感器对于乙醇气体具有较明显的响应,并具有一定的浓度梯度特性,证明该传感器的设计是可行的.A new kind of sensor for gas test based on the method of light addressable potentiometric sensor（LAPS） and porous silicon technique is developed. Combined with the MicroElectro Mechanical System （MEMS） techniques for the LAPS fabrication and the characteristics of this kind of planar apparatus, a new way for the detection of gases released during the metabolism of cells is attainable. From some primary results, it is shown that, the sensor had relatively evident response to alcohol gas under the room temperature, along with some concentration gradient characteristics. The feasibility of the design of this kind of sensor is proved.

关 键 词：LAPS 多孔硅 气体检测 传感器 化学MEMS 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]