复合量程微加速度计中阻尼的分析与设计  

Design and Analysis of Damping in Multi-Ranged Piezoresistive Micro Accelerometer

作　　者：毛海央[1] 熊继军[1] 张文栋[1] 郭涛[1] 徐栋[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,太原030051

出　　处：《传感技术学报》2006年第05B期2186-2189,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(50535030;50405025;50375050);霍英东基金资助(01052)

摘　　要：为了避免微加速度计在工作过程中因为共振导致结构损坏,需要在结构中合理设计阻尼.设计了一个复合量程压阻式微加速度计,为了使结构中各个传感器具有较好的阻尼参数,通过静电键合在硅结构层下制作一玻璃层.根据Reynolds方程,可知当硅-玻璃静电键合间距d=2.25μm时,复合量程微加速度计中各个传感器可得到较好的阻尼比.To reduce the probable damage caused by resonance in micro accelerometers, an adaptative method is of advantage in damping design. A multi-ranged piezoresistive micro accelerometer is designed, to achieve a reasonable damping ratio of this sensor so as to obtain a preferable amplitude-frequency characteristic and phase-frequency characteristic, an anodic bonding technology is adopted to fabricate a glass-cap below of the mass. The distance between the bottom of mass and the top of the glass-cap is calculated as 5.22 μm, according to the Reynolds function.

关 键 词：复合量程微加速度计 压阻式 二阶系统 阻尼 

分 类 号：TN302[电子电信—物理电子学]