电容式微加工超声传感器(cMUT)的有限元仿真  

Finite Element Emulation of A Capacitive Microfabricated Ultrasonic Transducer

作　　者：宋光德[1] 官志坚[1] 栗大超[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《传感技术学报》2006年第05B期2290-2292,2296,共4页Chinese Journal of Sensors and Actuators

摘　　要：介绍了电容式微加工超声传感器(cMUT)的基本结构和工作原理.同时使用有限元方法对cMUT的运行情况进行模拟.提出了两个ANSYS模型来阐述cMUT的塌陷电压与谐振频率.一个3D模型用来阐述制造过程中的残余应力对cMUT谐振频率的影响.另外一个3D模型阐述不同的运行环境对cMUT的谐振频率的影响.The basic structure and operating principle of capacitive microfabricated ultrasonic transducer is reported. At the same time the operation of cMUT is investigated. Two ANSYS models have been developed to illustrate the collapse voltage and resonant frequency of cMUT. A 3D model is used to illustrated the change of resonant frequency resulting from the residual stress which is introduced in the manufacture process. The other 3D model is used to illustrated the change of resonant frequency resulting from the medium in which the cMUT operates.

关 键 词：电容式微加工超声传感器 塌陷电压 谐振频率 有限元模型 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB552[自动化与计算机技术—控制科学与工程]