基于力学描述的MEMS悬臂梁系统级动态模拟方法  

Method of System-level Dynamic Simulation for A MEMS Cantilever Based on the Mechanical Description

作　　者：张健[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2006年第05A期1376-1380,共5页Chinese Journal of Sensors and Actuators

摘　　要：提出基于受力分析与能量原理建立等效集总力学描述的思想,实现对机电耦合MEMS悬臂梁动态行为的系统级模拟.利用受控源的反馈作用实现耦合,所建立的等效电路可用于模拟静电驱动下悬臂梁的转移特性、瞬态响应与固有频率.与Saber模拟的数据进行对比,证实了该方法的有效性.The idea of establishing the equivalent lumped mechanical description based on the mechanical analysis in combine with the energy principle is proposed, which is used for implementing the system-level simulation of the dynamic behavior of the eletro-mechanical coupled cantilever beam. By making use of the feedback function of the controlled sources to implement the coupling, the established equivalent circuits can simulate the transfer characteristic, transient response and inherent frequency of the beam under electrostatic loads. Simulation from Saber has confirmed the validity of the method.

关 键 词：MEMS设计 系统级模拟 力学描述 等效电路 受控源 

分 类 号：TN402[电子电信—微电子学与固体电子学]