用三维MEMS力学量传感器对涌浪微观形态测量的研究  

Study on Measurement of Surge Micro-Shape Using Three-Dimensional MEMS Mechanical Quantity Sensor

作　　者：徐克宝[1] 王军成[2] 陈广庆[1] 高丽丽[1] 李小波[1] 

机构地区：[1]山东科技大学机电学院测控系,青岛266510 [2]山东省科学院海洋仪器仪表研究所,青岛266001

出　　处：《传感技术学报》2006年第05A期1509-1511,共3页Chinese Journal of Sensors and Actuators

摘　　要：涌浪的形态对舰船驾驶航行、渔业生产、海洋作业和堤坝设施等具有很大的影响.对海浪的形态研究在军事、水上交通、海洋工业、渔业和民生方面都具有特殊的意义.MEMS力学量传感器是一种环境适应能力极强的微机电器件,用三维MEMS力学量传感器可以测量动态质点的速度、加速度、摆角和倾角等参数.通过三维MEMS力学量传感器的三维参数测量和分解可以得到涌浪质点的实时运动速度和运动轨迹数据,从而为涌浪的微观形态研究提供了依据.MEMS力学量传感器具有体积小、重量轻和输出灵敏度高等特点,特别适合于对海浪实时形态的研究.Surge shape has great effect on ship navigation, fishery production, ocean performance, dyke facilities. Study of ocean waves is of special significance in aspects such as military field, water traffic, ocean industry, fishery and people＇s livelihood. MEMS mechanical quantity sensor is micro-electromechanical device with high adaptive capacity to environment. Parameters such as velocity, acceleration, swing angle and tilt angle of dynamic particle can be measured by three-dimensional MEMS mechanical quantity sensor. Real-time moving velocity and moving track can be obtained by measuring and analyzing three-dimensional parameters of three-dimensional MEMS mechanical quantity sensor, thus it can provide foundation for study of surge micro-shape. MEMS mechanical quantity sensor is of characteristics such as small volume, light weight and high output sensitivity, and it is especially suitable for study of real-time shape of ocean waves.

关 键 词：MEMS涌浪 微观形态 形态跟踪 动态分析 

分 类 号：TB934[一般工业技术—计量学] TP212.9[机械工程—测试计量技术及仪器]