纳米级光栅容栅融合测量系统研究  

Research on Fusion Measurement System of Grating and Capacitive Grating with Nanometer Resolution

作　　者：毛谦敏[1] 刘安坤[1] 沈为民[1] 张增耀[1] 

机构地区：[1]中国计量学院计量技术工程学院,杭州310018

出　　处：《传感技术学报》2006年第05A期1519-1522,共4页Chinese Journal of Sensors and Actuators

基　　金：浙江省自然科学基金项目资助(Y104338)

摘　　要：利用容栅测量系统中激励信号源的设计技术,产生一组多相输出的调制信号源,作为光栅测量系统的多相线阵光源激励信号,发出的多相调制光信号,再经过标尺光栅调制后,由光电转换元件接收并获得一个复合的电信号.该信号经处理电路后,可获得一个频率与激励信号源的基波频率相等的电信号,检测这两个信号间的相位差的变化,可得到标尺光栅的移动距离x.将容栅和光栅测量技术有机地结合,并通过提高相位检测电路的细分数和减小线阵光源的点距,可达到亚微米或纳米级的测量分辨力.A group of multiphase modulation signal source which generates the multiphase linear light source actuating signal for grating measurement system is generated by using the design techniques of actuating signal source in capacitive grating measurement system. After the emitted multiphase modulating light signal is modulated by a scale grating, a compound electrical signal is obtained through a photoelectric component. Another electrical signal is obtained after processed by circuit, whose frequency is same as the fundamental frequency of actuating signal source, the movement distance x of scale grating can be obtained by detecting the change of phase difference between two electrical signals. Organically integrating the grating and capacitive grating measurement technology, by increasing the subdivision number of phase detecting circuit and decreasing the point distance of linear light source, sub-micron or nanometer-level measurement resolution can be reached.

关 键 词：光栅 容栅 纳米 融合测量技术 

分 类 号：TN491[电子电信—微电子学与固体电子学]