微构件316L在力电耦合下力学行为实验研究  

Mechanical Behavior Experimental Study of Microstructure with Mechatronic Coupling

作　　者：薛伟[1] 王权[2] 丁建宁[2] 余朋清[2] 

机构地区：[1]温州大学工业工程学院,浙江温州323035 [2]江苏大学微纳米科学技术研究中心,江苏镇江212013

出　　处：《传感技术学报》2006年第05A期1620-1622,共3页Chinese Journal of Sensors and Actuators

基　　金：浙江省科技攻关计划项目资助(2005C31048);江苏大学博士生创新基金项目资助

摘　　要：力学场与电场造成的场耦合下,微构件材料的力学行为的研究有重要的意义.用自制的微拉伸装置,通过对不同电流作用下的直径为20m的316L微构件进行拉伸实验,发现微构件在拉伸作用下出现明显的塑性变形;力学性能与宏观性能有所不同,出现了小尺寸效应;不同电流作用下,微构件的弹性模量和拉伸强度随电流的增大而降低,获得了可靠的设计参数.The mechanics problems can drastically compromise device performance and reliability. To solve these problems, there is a need to develop a fundamental understanding of mechanical behaviors of microstructures in MEMS. Also the increasing use of small micromechanical devices and advanced sensors has led to concern about the failure modes and reliability of these structures. A micro sample tension machine is made and using it one kind of micro sample fabricated with micromachining is tested. The tension experiments of the micro sample are done under different current to get the comparing data. The experiments yield reasonable and reproducible data. It is shown apparent plastic deformation of the micro sample happens under tension force. Mechanical behavior of the micro sample is distinguished to that of the sample with macro dimension. Micro size effect can be concluded about the micro sample under tension. Under different currents the elastic modulus and the tensile strength of the micro sample decrease with the current increasing. The relationships between them are gotten through experiment. The reliable designing parameters of the material are gained. The glaring outcome is that the uses of the material are depended highly on processing and fabrication techniques. The fabrication techniques can be developed and make the material both practical and reliable.

关 键 词：微构件316L 力电耦合 力学行为 

分 类 号：TB03[一般工业技术]