具有聚酰亚胺绝热层的新型非制冷红外探测器  

New Type of Uncooled Infrared Detector with Polyimide Thermal-Isolation Structure

作　　者：刘兴明[1] 韩琳[1] 刘理天[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《传感技术学报》2006年第05A期1725-1727,1730,共4页Chinese Journal of Sensors and Actuators

摘　　要：提出了一种基于聚酰亚胺绝热层的新型非制冷红外探测器结构.该结构具有工艺简单、成本低廉、成品率高等优点.利用底部反射金属层可以提高红外吸收率;底层金属和有源层间的隔离层不仅可以减小器件热导,还可以和上层材料层构成三明治红外吸收结构,进一步改善红外吸收效果.对制备工艺进行了简单介绍,器件性能测试结果表明,该新结构探测器虽然和空腔结构探测器的探测率相当,但在工艺制备及成品率方面要优异得多.A new type of uncooled infrared detector with polyimide thermal-isolation structure is presented. The detector has the advantage of simpler process, lower cost and higher yield. The bottom reflective metal layer can improve the infrared absorption. The unique sandwich structure consists of the segregation layer, located between the metal and the active layer, and upper layers can further improve infrared absorption as well. At the same time, the segregation layer decreases thermal conductance of the sensor. The process is described briefly and the performance is tested in this paper. Compared with the detector use air gap as thermal-isolation structure, the structure prepared has not only comparable performance but simpler process and higher yield.

关 键 词：聚酰亚胺 测辐射热计 绝热结构 

分 类 号：TN215[电子电信—物理电子学]