一种Sawyer马达驱动二维运动平台测量和控制系统设计(英文)  

Construction of a Measurement and Control System for a Sawyer Motor-driven Planar Motion Stage

作　　者：TANO M 高伟[1] DIAN S Y KIYONO S TOMITA Y MAKINO K MOTITA H 

机构地区：[1]日本东北大学 [2]日本住友重工株式会社

出　　处：《纳米技术与精密工程》2006年第3期182-189,共8页Nanotechnology and Precision Engineering

基　　金：Supported by a grant from the Japan Society for Promotion of Science (JSPS).

摘　　要：介绍一种使用Sawyer马达驱动的平台和表面编码器组成的精密定位系统．该平台包括一个台板和若干线性脉冲马达推动器．台板由防腐钢板制成,在其表面加工了齿牙．线性脉冲马达推动器靠空气支承悬浮在台板上,用以驱动平台．每一驱动器均由一个永久磁铁和两个驱动线圈组成,用以产生X向和Y向的平台驱动力．设计了一种表面编码器用以测量和控制平台的运动．一个正弦格栅装在台板上,一个传感组件装在平台驱动器上．在该传感组件中有三个光学传感器,用以测量三个分离点上的X和Y方向的位置,平台的θ_z向位置可以从传感器输出求得．开发了一种反馈控制系统用以控制平台运动．测量和反馈控制实验证明了该精密系统的可行性．This paper describes a precision positioning system combined with a Sawyer motor-driven stage and a surface enceder. The stage consists of a platen and forcers （linear pulse motors）. The platen is a passive steel plate with teeth over the surface. Each of the forcers, which is levitated on the platen as stage moving element by air-bearing, is composed of a permanent magnet and two driving coils to generate X-directional and Y-directional thrust forces against the platen for driving the stage. A surface encoder is constructed for measurement and control of the stage movement. A sine-grid is mounted on the platen and a sensor-unit is mounted on the stage moving element. There are three optical sensors in the sensor unit for measurement of the X-and Y-positions at three separate points. The θz displacement of the stage can be calculated from the sensor outputs. A feedback control system is developed for controlling the movement of the stage. Measurement and feedback control experiments are carried out to verify the feasibility of the precision positioning system.

关 键 词：测量 控制 定位 Sawyer马达 表面编码器 正弦格栅 传感器 

分 类 号：TG80[金属学及工艺—公差测量技术]