跑道形玻璃波导谐振腔滤波器的研制(英文)  

Investigation and Fabrication of Integrated Waveguide Racetrack Resonator Filter in Glass Material

作　　者：韩秀友[1,2,3] 庞拂飞[1,3] 耿建新[1] 蔡海文[1] 瞿荣辉[1] 方祖捷[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800 [2]大连理工大学物理系光子技术研究中心,大连116024 [3]中国科学院研究生院,北京100039

出　　处：《光子学报》2006年第10期1475-1477,共3页Acta Photonica Sinica

基　　金：Supported by the Optical Science and Technology Foundation of Shanghai Technology Committee(No.022261009)

摘　　要：采用Ag+-Na+离子工艺,在K9玻璃上制备了跑道形波导谐振腔滤波器.测试得到该滤波器自由光谱范围为FSR=0.177nm,对比对为Cr=7.5dB.同时分析得到耦合器的耦合系数为κ=0.916,耦合器和环形腔的损耗因子分别为δ=0.55,γ=0.48.耦合器的两波导几乎相连、条波导边缘不规则和一次离子交换波导表面缺陷是造成该波导滤波器具有较大损耗的主要原因.通过改进工艺技术降低波导损耗,该滤波器可以用于光通信、传感等领域,也可与其它波导结构相结合实现新的功能.A racetrack resonator filter is fabricated by Ag^＋-Na^＋ ion-exchange technique in K9 glass. The free spectrum rang （FSR） and contrast ratio （ Cr ） of the resonator are tested to be 0. 1 7 7 nm and 7. 5 dB. With fitted results, the coupling ratio is κ=0. 916, the loss factors of the coupler and the resonator are δ= 0. 55 and γ= 0. 48, respectively. The relative large losses of the waveguide device are due to the almost connection of the coupler waveguides, irregularity of the strip waveguide side and flaw of waveguide surface after one-step ion-exchange. By decreasing loss, this integrated waveguide resonator filter may be used in optics communications or sensing fields and can be combined with other waveguide structures to perform further functions.

关 键 词：集成光学 波导谐振腔 离子交换 

分 类 号：TN814[电子电信—信息与通信工程]