超小型非硅基微机械可调光衰减器  

A Micromachining Based Miniature Variable Optical Attenuator

作　　者：万鹏[1] 袁野[2] 吴兴坤[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室光及电磁波研究中心,杭州310027 [2]华信邮电咨询设计研究院有限公司,传输设计研究院,传输设计研究三所,杭州310014

出　　处：《光子学报》2006年第10期1505-1508,共4页Acta Photonica Sinica

摘　　要：研制了一种新型的超小型电磁驱动微机械可调光衰减器(VOA).该器件采用电磁驱动器转动硅基微镜改变光路实现可调衰减,在结构上采用了全磁性回复,完全摆脱了通常的弹性回复造成的部件疲劳、零点偏移等器件重复性问题.驱动电压为0～5V,工作范围0～40dB,插入损耗小于0.8dB,回波损耗小于-50dB.器件重要部件采用微细电火花加工(EDM)技术制作,并应用FEA软件进行了结构优化,对衰减响应进行了详尽的理论分析.该VOA设计体积仅为25×10×7mm3,可构成阵列应用于波分复用(WDM/DWDM)系统中各信道的动态信号平衡或网络保护.A novel design of micro-machined variable optical attenuator （VOA） with a packaged size as small as 25× 10×7 mm^3 is presented. Attenuation was introduced by a rotatable miniature silicon mirror, with its orientation finely adjusted through the balance between a pair of electromagnetic forces. The design is free of conventional spring restoring force for attenuation reset and therefore ensures a high stability. The realizing structure was fabricated by EDM micro-machining as well as laser spot welding. VOA prototypes exhibit a wide attenuation range of 40 dB with an insertion loss of 0. 8 dB and backreflection of -50 dB.The measured result was compared with that of an FEA model using ANSYS software package and a good agreement was obtained. The VOA can be arrayed for effective signal balancing and device t3roteetion in WDM/DWDM network systems.

关 键 词：光纤通信技术 可调光衰减器(VOA) 微机械(MEMS) 电火花加工(EDM) 密集波分复用(DWDM) 

分 类 号：TN253[电子电信—物理电子学]