利用激光实时点扫描成象监测／检测物体表面系统  

REAL TIME LASER POINT SCANNING IMAGING FOR SURFACE INSPECTION

作　　者：杨少辰[1] 李志娟 刘夏萍 刘依真[1] 宫润泽[2] 富金刚 范文友[2] 

机构地区：[1]北方交通大学 [2]哈尔滨铁路局哈尔滨科学技术研究所

出　　处：《铁道学报》1996年第6期76-82,共7页Journal of the China Railway Society

摘　　要：激光实时点扫描成象已成为一种深具潜力的监测与研究手段，并具有在半导体工业、荧光显微成象和生物诊断领域广泛应用的前景。本文讨论利用激光点扫描成象的基本原理和检测光路的实现；讨论影响扫描成象的基本因素和扫描成象的技术指标。The galvanometer based point scanning system was designed for real time image capture system for applications from semiconductor inspection to biological diagnostics. To assess the performance of galvanometer scanners, an imaging system was built and detected for its linearity, pixels stability and gray scale uniformity. It is shown that laser point scanning imaging has powerful capability in fast and high resolution applications. A kind of experiment was done for inspection of the surface of railway wheel pivot.

关 键 词：激光技术 扫描成象 检测 监测 物体表面 

分 类 号：TN247[电子电信—物理电子学]