ZrO_2薄膜的改性与抗激光损伤研究  

Modification and laser-damage resistance of zirconia thin films

作　　者：罗爱云[1] 沈军[1] 杨帆[1] 吴广明[1] 周斌[1] 倪星元[1] 

机构地区：[1]同济大学波耳固体物理研究所,上海200092

出　　处：《强激光与粒子束》2006年第9期1486-1490,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金重点资助课题(21033040);国家863计划项目资助课题;上海纳米科技与产业促进中心项目资助课题(0216nm035;0352nm022);教育部跨世纪优秀人才计划资助课题;上海市重点学科建设项目;上海市科委中法合作项目资助课题(02SL001)

摘　　要：采用水热合成技术,制备了ZrO2胶体,用旋涂法镀制了单层ZrO2介质膜以及添加了有机粘合剂PVP的复合ZrO2-PVP薄膜。采用X射线衍射(XRD)、椭偏仪、红外分光光度计(FTIR)、原子力显微镜(AFM)等仪器对干凝胶及薄膜进行了性能测试和表征,并用输出波长为1.064μm、脉宽为10 ns的电光调Q激光系统产生的强激光测试其激光损伤阈值。测得ZrO2和ZrO2-PVP薄膜在300℃热处理60 min后的激光损伤阈值分别为24.5 J/cm2和37.8 J/cm2。研究表明:添加有机粘合剂后的复合薄膜具有平整的表面结构;有机粘合剂的添加有助于提高薄膜的折射率和激光损伤阈值,其中,ZrO2-PVP复合薄膜的折射率可高达1.75,激光损伤阈值达到37.8 J/cm2,比ZrO2单层膜的激光损伤阈值提高50%。ZrO2 sol was obtained by using hydrothermal synthesis. Thin ZrO2 films and ZrO2-PVP composite films were prepared with spin coating method. Both the ZrO2 films and ZrO2-PVP composite films were characterized by ellipsometer, FTIR, AFM respectively. The crystallization behavior of ZrO2 xerogels was examined by X-ray diffraction. And 1-on-1 laser-induced damage threshold tests on ZrO2 films and ZrO2-PVP composite films were carried out with a Q-switched Nd..YAG high power laser at 1 064 nm with a pulse width of 10 ns. The measured laser-induced damage threshold of ZrO2 films with heat treatment at 300 ℃ for 60 min was 24.5 J/cm^2 , and 37.5 J/cm^2 for that of ZrO2-PVP composite films. The experimental results show that the incorporating organic binder PVP （polyvinyl pyrrolidone）, without obvious influence on film surface micro morphology, helps to improve the performances of ZrO2 films such as high refractive index, thickness and laser induced damage threshold. The ZrO2- PVP composite films can achieve good performances with high refractive index of 1.75 and the laser-induced damage threshold of 37.8 J/cm^2, which is 50% higher than that of ZrO2 films.

关 键 词：ZRO2薄膜 激光损伤 水热合成 激光损伤阈值 有机粘结剂 

分 类 号：O484.4[理学—固体物理]