基于光学色差传感器的表面粗糙度测量  

Measurement of Roughness Surface Using Optical Chromatic sensor

作　　者：王晶[1] 洪海涛[1] 邹志华 

机构地区：[1]上海交通大学信息检测技术及仪器系,上海200030 [2]英特尔产品(上海)有限公司,上海200131

出　　处：《仪表技术与传感器》2006年第10期4-5,20,共3页Instrument Technique and Sensor

摘　　要：随着机械加工自动化程度的提高,对表面粗糙度的测量提出了越来越高的要求。表面粗糙度的测量一直面临着提高测量精度和抗干扰能力的挑战,提出了一种新的利用光学色差来测量表面粗糙度的非接触测量方法,这一方法不但具有一般非接触测量所具有的快速、对工件表面无损伤等特点,而且在提高精度和抗干扰能力两方面都有很强的优势。重点介绍了利用光学色差法测量表面粗糙度的理论依据以及基于光学色差原理的光学色差传感器,分析了应用光学色差传感器测量表面粗糙度的工作原理。通过实验证明了理论分析与实验结果相符。The advance in manufacturing automation has created the need to develop in measurement of surface roughness. There are many challenges in surface roughness measurement, such as precision and anti-jamming performance of measurement. Introduced a chromatic sensor based on chromatic aberration and analyzed the work principle of non-contact measurement for surface roughness using chromatic sensor. This method for non-contacted measurement of surface roughness is not only helpful to quick, nondestructive measurement but also helpful to increasing precision and anti-jamming. The theoretic principles of non-contact measuring surface roughness based on chromatic aberration and chromatic sensor have been introduced, and the working principle of chromatic sensor has been analyzed. Experiments have been done to prove the theoretic.

关 键 词：色差 光学 传感器 表面粗糙度 

分 类 号：TH741[机械工程—光学工程]