失效原子力显微镜硅针尖再生  

Rebirth of Worn Atomic Force Microscopy Silicon Tips

作　　者：徐化明[1] 王锐[1] 国立秋[1] 王秀凤[2] 陈皓明[2] 梁吉[1] 

机构地区：[1]清华大学机械工程系,北京100084 [2]清华大学物理系,北京100084

出　　处：《无机化学学报》2006年第11期1973-1976,共4页Chinese Journal of Inorganic Chemistry

基　　金：国家自然科学基金资助项目(No.10332020)。

摘　　要：原子力显微镜的传统商品硅针尖在使用过程中极易因磨损而失效,本文研究了一种在实验室条件下简易可行的回收利用失效硅针尖的方法。在原子力显微镜的敲击模式下使用曲率半径大于100nm的失效硅针尖对生长单壁碳纳米管的样品表面进行扫描,把样品表面的单壁碳纳米管管束粘接到硅针尖上,可制得直径在5～20nm的碳纳米管针尖。实验对碳纳米管针尖和新的商品硅针尖进行了成像对比,所制备的碳纳米管针尖不仅在成像分辨率而且在成像稳定性上都优于新的商品硅针尖。Commercially available Atomic Force Microscopy （AFM） silicon probe tips are easily worn when being used for imaging. The structural and mechanical properties of carbon nanotubes make them ideal tips for AFM. To reuse the worn silicon tips, carbon nanotube tips were successfully fabricated by imaging the nanotubes- covered wafers in tapping mode of AFM by using worn silicon tips with diameters more than 200 nm. Carbon nanotube tips are composed of bundles of single-walled carbon nanotubes and have diameters of 5-20 nm. Carbon nanotube tips showed higher resolution and stability than new silicon tips when imaging a 10 nm thick Au film on silicon surface. This method is an effectively simple method for rebirth of worn silicon tips.

关 键 词：原子力显微镜 碳纳米管针尖 失效硅针尖 

分 类 号：O613.71[理学—无机化学]