矫顽力可调的多孔硅基Fe膜  

Control of coercivity of iron films deposited on porous silicon substrates

作　　者：邱学军[1] 张云鹏[2] 何正红[1] 白浪[1] 刘国磊[2] 王跃[1] 陈鹏[1] 熊祖洪[1] 

机构地区：[1]西南大学物理学院,重庆400715 [2]山东大学物理与微电子学院,济南250100

出　　处：《物理学报》2006年第11期6101-6107,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10504027);教育部新世纪优秀人才支持计划(批准号:NCET-05-0772);霍英东教育基金(批准号:101006);人事部留学人员科技活动项目择优资助课题;重庆市自然科学基金(批准号:CSTC;2005BB3049)资助的课题.~~

摘　　要：采用电化学腐蚀法制备了不同多孔度的多孔硅(PS),再通过磁控溅射法在该PS衬底上沉积了一定厚度的Fe膜;并对样品进行了X射线衍射的结构分析、扫描隧道显微技术的表面形貌观察和磁光克尔效应的测量.发现在同一Fe膜厚度下,相对于参考样品硅上的Fe膜,多孔硅上Fe膜的矫顽力更大;同时观察到多孔硅基Fe膜随着PS多孔度的增加,矫顽力相应变大;而对于多孔度相同的多孔硅基样品,随着Fe膜厚度的增加矫顽力却逐步减小.得出了多孔硅特有的海绵状疏松结构能有效调节Fe膜矫顽力大小的结论.Porous silicon （PS） with different porosity was obtained by anode electrochemical etching of boron-doped Si （100） ; the asetched samples were then covered with Fe films by magnetron sputter technique. Analysis of surface profile and structural investigation were done by scanning tunneling microscopy and X-ray diffraction. Magneto-optical Kerr effect was employed to measure the hysteresis loops of the iron films sputtered onto PS and the reference sample on the Si substrate. The coercivity of the PS-based Fe films is larger than that of the Si-based ones, and increases with the porosity of the PS substrate. As for the PS- based samples with the same porosity, the coercivity of Fe films decreases with their thicknesses in a certain range. We found that the spongelike structure of PS can be effectively used to control the coercivity of iron films on the PS substrates.

关 键 词：多孔硅 海绵状结构 Fe薄膜 矫顽力 

分 类 号：O484.43[理学—固体物理]