STM式三维nm级轮廓仪的研究  

An STM-Based 3-D Profiler with a Resolution of Nanometer Level

作　　者：李文菊[1] 张鸿海[1] 师汉民[1] 陈日曜[1] 

机构地区：[1]华中理工大学机械科学与工程学院

出　　处：《华中理工大学学报》1996年第7期34-36,共3页Journal of Huazhong University of Science and Technology

基　　金：国家自然科学基金

摘　　要：基于ＳＴＭ式三维ｎｍ级轮廓仪的检测原理、检测系统，研究了与其相关的检测技术．该轮廓仪可直接测量较大工件，扫描范围为１４０μｍ×１４０μｍ，分辨率达ｎｍ级．最后对工作台扫描非线性及扫描控制技术进行讨论，并利用多项式拟合法补偿工作台扫描的非线性误差，进而提出了一种平滑反馈扫描技术．With a description of the measuring principle and the system of an STM-based 3-D profiler,some related measuring techniques are investigated. The working-table-driven profiler can be used to directly a large workpiece of 140 square microns with a resolution of the nanometer level. The nonlinearity of the scanning of the working table and the scanning control are discussed. The nonlinear error of the table scanning is compensated by polynomial fitting and a smooth feedback scanning technique is proposed.

关 键 词：检测 扫描隧道显微镜 轮廓仪 

分 类 号：TN16[电子电信—物理电子学] TH821[机械工程—仪器科学与技术]