正弦相位调制位移干涉测量技术中调制频率的优化选择  

Analysis of Modulation Frequency in Sinusoidal Phase Modulating Interferometry for Displacement Measurement

作　　者：刘英明[1] 王向朝[1] 

机构地区：[1]中国科学院上海光学精密机械研究所信息光学实验室

出　　处：《中国激光》2006年第11期1574-1579,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金(60578051);上海市科委国际合作计划项目(051107085)资助课题

摘　　要：针对正弦相位调制(SPM)干涉测量技术用于位移测量时,调制频率对干涉信号相位解调的影响,提出一种调制频率的优化选择依据.通过对干涉信号的频谱进行分析,发现当被测位移幅度较小时,较小的调制频率即可满足相位解调的要求;而当被测位移较大时,必须相应地增大调制频率,才能获得比较准确的测量结果.模拟计算以及实验结果表明,被测位移信号的幅度每增大四分之一测量光源波长,调制频率需要相应增大4倍于被测信号频率的大小,才能满足正弦相位调制位移干涉测量技术信号处理的需要.The effect of modulation frequency on phase demodulation is analyzed m smusoldal phase modulating （SPM） interferometry for displacement measurement. A rule for selecting modulation frequency is presented. The spectrum of interference signal is analyzed. It is found that when the displacement measurement range is narrow, small modulation frequency can meet the phase demodulation need; when the displacement measurement range is enlarged, modulation frequency has to he increased. Simulated data and experimental results indicate that with an ,1/4 increase in amplitude of vibration to be measured, modulation frequency is required to increase to four times as frequency of vibration to be measured, where ,1 is the wavelength of light source.

关 键 词：测量 正弦相位调制 调制频率 频谱分析 

分 类 号：TH744.3[机械工程—光学工程]