厚膜压力传感器的结构优化  

Structure optimization of thick film pressure sensors

作　　者：陈建群[1] 马以武[1] 张宾[1] 

机构地区：[1]中国科学院合肥智能机械研究所传感技术国家重点实验室合肥,安徽230031

出　　处：《传感器与微系统》2006年第11期57-60,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60374050)

摘　　要：为提高厚膜压力传感器的稳定性,借助有限元分析软件Ansys,研究了厚膜压力传感器弹性体的应力分布,进而设计了应变电阻的尺寸,并优化了其布局。采用Ф18mm的96%A l2O3弹性体瓷件研制了一种新型厚膜力敏芯片,实验结果表明:它的热零点温漂小于3×10-4FS/℃,过载达120%,非线性误差及迟滞误差都小于±0.2%FS,精度由±0.4%FS提高到±0.2%FS,其线性度和稳定性得到很大提高,可广泛应用于仪器仪表、测控和导航等领域。To improve the stability of the thick film pressure sensors, their elastomeric stress distribution is studied by finite element analysis （FEA） software Ansys. Thus the strain gauge dimension is designed and their location is optimized. A new-style thick film pressure sensor is manufactured from Ф18 mm,96 % Al2O3 elastomeric ceramic. Experimental results indicate that its zero drift is less than ± 0.3 % FS/℃, its over loading is 120 %, its non-linearity and hysteresis error are less than ± 0.2 % FS, and its precision is Up to ± 0.2 % FS from ±0.4 % FS. The thick film pressure sensors linearity and stability are largely improved. Therefore, the thick film pressure sensors can be used in scientific instrument, measure and control and aeronautical instrument field.

关 键 词：厚膜压力传感器 有限元分析 稳定性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN4[自动化与计算机技术—控制科学与工程]