超稳定TO-8型压力传感器在气体导热系数测定实验中的应用  

Application of ultra-stable TO-8 pressductor in measuring coefficient of thermal conductivity of air

作　　者：鲁长宏[1] 张瑞[1] 李玉兰[1] 

机构地区：[1]北京理工大学应用物理系,北京100081

出　　处：《物理实验》2006年第11期31-34,共4页Physics Experimentation

摘　　要：介绍了TO-8型压力传感器的性能及电源电路.以气体导热系数测定实验为例,用TO-8型压力传感器制成的测压装置代替旋转式麦氏真空计,利用可调针孔式放气阀对真空气压进行连续调节,实现了对测试系统真空度的实时监测.The performance and the power supply circuit of TO-8 pressure sensor are introduced. In the experiment of measuring coefficient of thermal conductivity of air, apparatus using TO-8 pressure sensor is substituted for rolling McLeod vacuum gauge, the vacuum pressure could be adjusted continuously by using the pinhole valve and the vacuum degree of the system could be monitored realtimely.

关 键 词：TO-8压力传感器 气体导热系数 针孔式放气阀 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]