智能化压力传感器的研制  

Fabrication of Intelligence Pressure Sensors

作　　者：尹志华[1] 范兆书[1] 孙以材[1] 张储林 

机构地区：[1]河北工业大学电子系

出　　处：《河北工业大学学报》1996年第4期56-68,共13页Journal of Hebei University of Technology

摘　　要：介绍了智能化硅压阻传感器的微机检测、运算处理和控制部分．由平面工艺制成的硅压阻传感器，当其把压力信号转换为电信号后，经摸拟通道的预处理，再由微机对检测的信号进行零点及灵敏度的温度补偿以及对压力非线性特性进行校正，最后对测量结果进行标度变换并显示．使传感器测量精度大大提高并且有程控、运算处理等功能．从而，可长期稳定地工作在环境温度变化较为频繁的场合．The intelligence pressure sensor of the silicon piezoresistive type introduced by its microcomputer testing, operation process and controlling parts is presented. After the electrical signal has been converted to the pressure signal of the silicon piezoresistance pressure sensor made by the plane technology, it is pre-processed through a analogue channel Then the temperature compensation of its offset and senstivity of pressure and the correction of its non-linearity error are completed by using a microcomputer. The measurement results are converted and revealed into the pressure scale. Thus, the measurement precision of the sensor is greatly improved and the sensor has the function of programming control and operation process. This intelligence sensor can steadily work for a long term in the environment with frequently varing temperatures.

关 键 词：压力零点 温度补偿 智能化 压力传感器 

分 类 号：TH823.2[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]