利用离子交换技术制备跑道形波导谐振腔滤波器的研究  

Study of racetrack waveguide resonator filter fabricated by ion-exchange technique

作　　者：韩秀友[1] 庞拂飞[1] 蔡海文[1] 瞿荣辉[1] 方祖捷[1] 

机构地区：[1]中国科学院上海光学精密机械研究所

出　　处：《光学技术》2006年第6期845-847,共3页Optical Technique

基　　金：上海市科委光科技资助项目(022261009)

摘　　要：采用AgNO3和KNO3混和熔盐作为离子交换源,在K9玻璃上制备了跑道形波导谐振腔滤波器。利用ASE宽带光源和光谱仪对器件特性进行了测试,得到的该滤波器自由光谱范围为0.176nm。对比对Cr=4dB和3dB带宽δλ=0.13nm来说,耦合系数和传输损耗分别为к=0.9和α=3.2dB/cm。测试了环形腔的热光调相特性,在16℃的变化范围内实现了2π的相移。通过分析,波导材料的热光系数约为1.49×10-5/℃。该滤波器不仅可用于滤波、传感等领域,而且也可与其它波导结构相结合实现新的功能。A racetrack waveguide resonator filter is fabricated on K9 glass by ion-exehange in mixed melt salt of AgNO3 and KNO3. The characteristics of the filter is measured by broadband ASE source and optical spectrum analyzer, whose free spectrum range （FSR） is 0. 176nm, contrast ratio is Cr =4dB, 3dB bandwidth is δλ =0.13nm, coupling ratio and propagation loss are κ= 0, 9, α = 3.2dB/cm respectively. The phase shift induced by thermo-optical effect is investigated. The phase shift of 2π is realized within 16℃ temperature change, and the thermo-optical coefficient of the waveguide material is about 1.49×10^-5/C. The filter may be used in filter or sensor fields and can be perform new functions combined with other waveguide structures.

关 键 词：集成光学 波导谐振腔 离子交换 热光效应 

分 类 号：TN265[电子电信—物理电子学]