Thermal conductivity measurement of InGaAs/InGaAsP superlattice thin films  

作　　者：CHEN Zhen YANG Juekuan ZHUANG Ping CHEN Minhua ZHU Jian CHEN Yunfei 

机构地区：[1]Department of Mechanical Engineering, Southeast University, Nanjing 210096, China [2]No. 55 Research Institute, China Electronics Technology Group Corporation, Nanjing 210096, China [3]Department of Mechanical Engineering and China Education Council Key Laboratory of MEMS, Southeast University, Nanjing 210096, China

出　　处：《Chinese Science Bulletin》2006年第23期2931-2936,共6页

基　　金：This work was supported by the National Basic Research Program of China(2006CB300404);National Natural Science Foundation of China(Grant Nos.50275026,50475077,50505007&50506008);the Natural Science Foundation of Jiangsu Province(BK2002060);research funding for the Doctor program from Chinese Education Ministry(20050286019);Chen Yunfei also acknowledges the financial support from the Program for New Century Excellent Talents in University(NCET-04-0470).

摘　　要：The thermal conductivities of InGaAs/ InGaAsP superlattices with different period lengths were measured from 100 to 320 K using 3ω method. In this temperature range, the thermal conductivities were found to decrease with an increase in temperature. For the period length-dependant thermal conductivity, the minimum value does exist at a certain period length, which demonstrates that at a short period length, superlattice thermal conductivity increases with a decrease in the period length. When the period is longer than a certain period length, the interface thermal resistance dominates in phonon transport. The experimental and theoretical results confirmed the previous predictions from the lattice dynamics analysis, i.e. with the increase in period length, the dominant mechanisms of phonon transport in superlattices will shift from wave mode to particle mode. This is crucial for the cutoff of the phonons and lays a sound foundation for the design of superlattice structures.The thermal conductivities of InGaAs/InGaAsP superlattices with different period lengths were measured from 100 to 320 K using 3ω method. In this temperature range, the thermal conductivities were found to decrease with an increase in temperature. For the period length-dependant thermal conductivity, the minimum value does exist at a certain period length, which demonstrates that at a short period length, superlattice thermal conductivity increases with a decrease in the period length. When the period is longer than a certain period length, the interface thermal resistance dominates in phonon transport. The experimental and theoretical results confirmed the previous predictions from the lattice dynamics analysis, i.e. with the increase in period length, the dominant mechanisms of phonon transport in superlattices will shift from wave mode to particle mode. This is crucial for the cutoff of the phonons and lays a sound foundation for the design of superlattice structures.

关 键 词：3ω法 热传导性 超晶格 薄膜 

分 类 号：O484[理学—固体物理]