DDI法测薄膜光学常数  

DDI Method for Measuring Optical Constants of Thin Films

作　　者：谷晋骐[1] 郑永星[1] 

机构地区：[1]天津大学应用物理系

出　　处：《中国激光》1996年第10期915-919,共5页Chinese Journal of Lasers

摘　　要：双光束双波长激光干涉（ＤＤＩ）法采用自行设计的可调双波长氦氖激光器作光源，可在同一光路中通过两次测量获得薄膜样品两个波长（０．６３３μｍ，３．３９μｍ）下的光学常数，即折射率、消光系数和厚度。论述了测量原理、测量装置和测量结果。By a double-beam and double-wave interferometric (DDI) method, the opticalconstants of thin films, i. e. refractive index, extinction coefficient and thickness may bedetermined in infrared (3. 39um) and visible (0. 633 um) ranges at the same optical pathwith a tunalbe double wave He-Ne laser designed by ourselves. The measuring principle andthe device are described.

关 键 词：薄膜 光学常数 测量 DDI法 

分 类 号：O484.41[理学—固体物理]