Micromechanical tunable vertical-cavity surface-emitting lasers  

作　　者：关宝璐 郭霞 邓军 渠红伟 廉鹏 董立敏 陈敏 沈光地 

机构地区：[1]Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China

出　　处：《Chinese Physics B》2006年第12期2959-2962,共4页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China （Grant No 60506012）, the Fok Ying-Tong Foundation （Grant No 101062）, the Natural Science Foundation of Beijing China （Grant No KZ200510005003）, the Science Star of Beijing China （Grant No 2005A11）, and the Funding Project for Academic Human Resources Development in Institutions of Higher Learning Under the Jurisdiction of Beijing Municipality China （Grant No 20051D0501502）.Acknowledgement The authors gratefully acknowledge the staff of M0CVD, Zhou Deshu, and Han Jinru for technical assistance. The authors also thank Professor Academician Chen Lianghui, Professor Tan Manqing and Mr Wang Xuming at the Institute of Semiconductors, CAS for technological support in device fabrication.

摘　　要：We report the study on a short wavelength-tunable vertical-cavity surface-emitting laser utilizing a monolithically integrated bridge tuning microelectromechanical system. A deformable-bridge top mirror suspended above an active region is utilized. Applied bridge-substrate bias produces an electrostatic force which reduces the spacing of air-gap and tunes the resonant wavelength toward a shorter wavelength （blue-shift）, Good laser characteristics are obtained： such as continuous tuning ranges over 11 nm near 940 nm for 0-9 V tuning bias, the peak output power near 1 mW and the full-width-half-maximum limited to approximately 3.2-6.8 rim. A detailed simulation of the micromechanical and optical characteristics of these devices is performed, and the ratio of bridge displacement to wavelength shift has been found to be 3：1.We report the study on a short wavelength-tunable vertical-cavity surface-emitting laser utilizing a monolithically integrated bridge tuning microelectromechanical system. A deformable-bridge top mirror suspended above an active region is utilized. Applied bridge-substrate bias produces an electrostatic force which reduces the spacing of air-gap and tunes the resonant wavelength toward a shorter wavelength （blue-shift）, Good laser characteristics are obtained： such as continuous tuning ranges over 11 nm near 940 nm for 0-9 V tuning bias, the peak output power near 1 mW and the full-width-half-maximum limited to approximately 3.2-6.8 rim. A detailed simulation of the micromechanical and optical characteristics of these devices is performed, and the ratio of bridge displacement to wavelength shift has been found to be 3：1.

关 键 词：microelectromechanical devices vertical-cavity surface-emitting lasers tunable bridge electrostatic tuning 

分 类 号：O43[机械工程—光学工程] TN24[理学—光学]