制备工艺对SnO_2:Sb透明导电膜性能的影响  

EFFECT OF PREPARATION PROCESSES ON PROPERTIES OF SnO_2:Sb TRANSPARENT CONDUCTIVE FILM

作　　者：朱小平[1] 于长凤[1] 凌青 张脉官 戴静[1] 

机构地区：[1]景德镇陶瓷学院,333001 [2]广东佛山金刚新材料所

出　　处：《中国陶瓷工业》2006年第5期1-5,共5页China Ceramic Industry

摘　　要：将SnCl2.2H2O和SbCl3分别溶解于乙醇中,搅拌至完全溶解,以不同的Sb/Sb混合制备得到溶胶后,分别采用浸渍提拉、喷涂、旋涂工艺制备透明导电膜,并考察了不同制备工艺及热处理温度对膜的厚度、薄膜方块电阻以及对薄膜透光率的影响,运用XRD、SEM、TEM对所制备的透明导电膜进行了分析表征。First SnCl2·2H2O and SbCl3 were dissolved with ethyl alcohol respectively, then nesa coatings were prepared with different ratio of Sb/Sn sols by different methods as such dipping-coating, spraying and spinning. The effects of different methods and heat treatment temperatures on thickness, sheet resistance and transmittance of thin films were studied. Transparent conductive films were characterized by XRD, FT-IR, SEM, TEM.

关 键 词：SNO2薄膜 Sb掺杂 透明导电膜 浸渍捉拉 喷涂 旋涂 

分 类 号：TB383.2[一般工业技术—材料科学与工程]