ZBO(ZnO∶B)靶材烧结机理与特征的研究  

Study of Sintering Mechanism and Characteristics of ZBO Target

作　　者：侯天雅[1] 张弓[1] 庄大明[1] 

机构地区：[1]清华大学机械工程系,北京100084

出　　处：《真空科学与技术学报》2006年第6期504-507,共4页Chinese Journal of Vacuum Science and Technology

基　　金：国家863基础研究基金项目(No.2004AA513023)

摘　　要：用常压烧结方法，在1200℃-1350℃烧结不同含B量的掺硼氧化锌（ZBO）靶材。研究了掺杂量、烧结温度对ZBO靶材微观结构的影响。实验表明，随着烧结温度的增加。ZBO陶瓷的晶粒大小和密度逐渐增大。指出了由于B2O3的挥发，造成ZBO靶材的剩余含B量与掺B量的不符，要获得含定量B的ZBO就必须掺入大约2倍所需量的B2O3。Boron-doped zinc oxide（ZBO） target material was developed by sintering of ZnO and B2O3 powders at a temperature ranging from 11200℃～ 1350℃.The influence of dopant content and sintering temperature on ZBO microstructures was studied with scanning dectron microscopy （SEM） and X-ray diffraction（XRD）. The results show that as aintering temperature rises, both the grain size and the density of ZBO increase. Interesting finding is that considerable amount of B2O3 volatilizes.Twice as much the B2O3 content should be added to the mixture before sintering.

关 键 词：常压烧结 ZBO SEM XRD 

分 类 号：TM615[电气工程—电力系统及自动化]