铁基多层纳米磁性薄膜的组织与性能  

Microstructure and Properties of Ferrous Magnetic Nano-films

作　　者：王军[1] 尤富强[1] 殷俊林[1] 严彪[1] 

机构地区：[1]同济大学材料学院金属基材料研究所

出　　处：《热处理》2006年第4期43-45,共3页Heat Treatment

基　　金：上海市科委科技攻关项目"新型稀土掺杂铁基纳米多层磁性薄膜的研究开发";课题号:0452nm077;同济大学工科基金项目:新型稀土掺杂铁基纳米多层磁性薄膜研究。

摘　　要：利用溅射技术制备了铁基多层纳米磁性薄膜,通过溅射参数的调整,可以精确地控制薄膜的厚度。然后对薄膜进行退火处理,使薄膜晶化。最后,对薄膜磁性能进行了测量,得到了较好的结果。Ferrous magnetic nano-films were got by sputtering technology. The thickness of film can be precisely controlled by adjusting the parameter of sputtering process, and then the films became crystals by means of annealing. At last, the magnetic properties of the films were measured, with the result being satisfactory.

关 键 词：磁性薄膜 性能 组织 溅射 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG132.27[金属学及工艺—金属学]