新型压电微泵的结构设计与理论分析  

Design of a novel piezoelectric micropump structure

作　　者：耿照新[1] 崔大付[1] 王海宁[1] 刘长春[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室

出　　处：《传感器与微系统》2006年第12期82-84,88,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学重大基金资助项目(20299030);国家自然科学重点基金资助项目(604270001)

摘　　要：微泵在微流控化学分析芯片中有很大的应用前景,日益成为人们研究的热点。从结构设计、理论分析和工艺加工3个方面研究了微阀与微泵,设计出用压电驱动和聚二甲基硅氧烷(PDMS)作为泵膜的集成微阀与微泵,其特点是原理新颖、结构简单、易于加工、操作方便。结构主要是由PDMS泵膜、硅片和压电驱动器组成,其中,PDMS既是泵膜和缓冲单元,也是主动阀片。在直流电压的驱动下,其工作状态是微阀,阻止流体的单向流通,在方波信号的驱动下,其工作状态是微泵,实现流体的吸入与泵出。给出各种几何参数、工作原理和工艺流程。Micropump has a large potential for an application to microchemical analysis systems and much attention has been given to develope micropump. Through studying the micropump and microvalve used in microfluidic control chemical analysis from the design of structure, working principle and fabrication process, a novel piezoelectric-driven integrated microump and microvalve is developed. The construction and the fabrication process is quite simple. It consists of flexible PDMS pump diaphragm, base plate and piezo electric actuator. PDMS diaphragm, meanwhile,is a active valve whose functions are manipulating/directing/switching the flow direction （forward or backward）, and is a buffer element too. This device can work as a active valve when driving the piezoelectric actuator by a DC-voltage, and can work as micropump when driving the displacement unit in a square-wave manner. The geometry parameter,work principle and process of fabrication are given in detail.

关 键 词：压电 微泵 微阀 聚二甲基硅氧烷 

分 类 号：TH302[机械工程—机械制造及自动化]