两种压电驱动自吸微泵的研制与性能比较  

Manufacture and Performance Comparison of Two Kinds of Self-Priming Micropump Driven by PZT

作　　者：耿照新[1] 崔大付[1] 刘长春[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室

出　　处：《纳米技术与精密工程》2006年第4期320-325,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学重大基金资助项目(20299032);国家自然科学重点基金资助项目(604270001);国家自然科学基金资助项目(60501020)

摘　　要：微泵是微全分析系统中的重要单元.为解决微泵加工工艺复杂、自吸困难和可靠性低等问题,研制了两种应用于微流控系统中的压电驱动微泵.一种是将聚二甲基硅氧烷(PDMS)泵膜、单主动阀片和弹性缓冲单元集于一体的微泵,另一种是主动阀片与被动阀相结合的微泵,这两种微泵都适用于气体和液体工作物质,实现自吸,具有结构简单、易于加工及操作方便的特点.讨论了微泵的工作原理、工艺流程、工作性能及结构参数对微泵工作性能的影响,解决了加工工艺复杂、自吸困难和可靠性低等问题.在电压100V(35Hz条件下)和零背压的工作条件下,单主动阀微泵的最大液体泵速为5000μL/min,最大背压为5kPa;主动阀与被动阀相结合微泵的最大液体泵速5410μL/min,最大背压15kPa.后者背压与流速明显比前者的性能要好很多,尤其是背压方面.Micropump is a key element in micro total analysis. In order to solve some problems, such as complex fabrication, bubble tolerance and reliability, two kinds of Micropumps, which are driven by bimorph and applied in microflow control chemical analysis, were studied in design of structure, working principle, fabrication process, performance and structure parameter. These two kinds of micropumps can pump both gas and liquid. One consists of a silicon chip and an active microvalve which is also Polydimethylsiloxane diaphragm, and the other is integrated with a active microvalve, a check microvalve and a pump chamber. The micropumps are characterized by simple structure, easy fabrication, convenient operation and self-priming. This structrure micropump can solve some problems, such as complex fabrication, bubble tolerance and reliability, when applied voltage is 100 V（ square wave at 35 Hz） and backpressure keeps zero, the maximum flow rate and the backpressure of micropump with an active valve are about 5 000 μL/min and 5 kPa, respectively, while that of micropump with the combination of check valve and active valve reach 5 410μL/min and 15 kPa, respectively. The latter is better than the former in performance, especially in backpressure.

关 键 词：压电 微泵 微阀 聚二甲基硅氧烷(PDMS) 

分 类 号：TH703[机械工程—仪器科学与技术]