超精密角位移测量与控制技术研究  

Study on ultra-precision angular displacement measurement and control technique

作　　者：张金龙[1] 刘京南[2] 钱俊波[2] 王海春[1] 

机构地区：[1]南京师范大学电气与自动化工程学院,南京210042 [2]东南大学自动控制系,南京210096

出　　处：《仪器仪表学报》2006年第12期1738-1741,共4页Chinese Journal of Scientific Instrument

基　　金：江苏省高等学校自然科学研究计划(04KJB510073)资助项目

摘　　要：本文研究了双光栅衍射产生的莫尔信号的角位移特性,建立了精密角位移测量的数学模型,并进行了计算机仿真,用实验验证了激光莫尔信号特性的理论计算结果与实验测定结果的一致性。在此基础上利用激光莫尔信号设计了一套精密角位移测量与控制装置,取零次莫尔信号为控制信号,由微机控制实现高精度角位移测量及全自动精密角度定位。采用的修正莫尔技术,可有效提高角位移检测信号的灵敏度及角度定位精度,且结构简单。实验结果表明,基于激光莫尔信号的精密测控装置可获得±50 nrad的角位移分辨率及±5μrad的角度定位精度。The angular displacement characteristic of moiré signals diffracted by double gratings was analyzed using diffraction theory. The mathematic model of the angular displacement measurement was established and computer simulation was carried out. The effect of various parameters on moiré signals was studied theoretically and experimentally,and the results are consistent. A precision angular displacement measurement and control apparatus based on moiré signals was designed. The device achieves precision angular displacement measurement and automatic angular alignment using computer controlled moiré technique. The modified moiré technique effectively improves the detecting sensitivity of the signals and simplifies the control system using only one pair of laser-moiré sensors. The experimental result shows that the proposed apparatus achieves the resolution of ±50 nrad and angular positioning accuracy of ±5μrad.

关 键 词：角度测量 莫尔信号 精密定位 自动控制 

分 类 号：TP274.5[自动化与计算机技术—检测技术与自动化装置]