厚膜陶瓷电容式压力传感器设计与制备  

Design And Production Of Thick Film Ceramic Capacitive Pressure Sensor

作　　者：李鹏[1] 李民强[1] 

机构地区：[1]中国科学院合肥智能机械研究所

出　　处：《传感器世界》2006年第12期12-15,共4页Sensor World

基　　金：安徽省科技攻关项目资助(批准号:040120503)

摘　　要：结合厚膜技术、陶瓷技术研制了双电容结构的压力传感器,详细阐述了厚膜陶瓷电容式压力传感器的结构设计、工作原理、制备方法、测试结果。试验结果表明:研制的传感器工作稳定,测量精确,非线形误差低于1.0%,迟滞误差小于0.5%,测试电容和参考电容温度系数几乎一致。The pressure sensor with dual-capacity was designed by the thick film technology and the ceramic production technique. The structure design, basic working principle, fabrication technique and performance test of thick film ceramic capacitive pressure sensor were described in detail. Experimental results indicate that the sensor has many merits such as： the non-linearity error and hysteresis error are within 1.0% and 0.5% respectively. Both temperature coefficient and test capacity values are identical.

关 键 词：厚膜 电容式 压力传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]