大口径碳化硅平面反射镜的数控研磨与在线检测  

Computer Controlled Grinding and On-line Testing of Large-aperture Planetary Silicon Carbide(SiC) Mirror

作　　者：牛海燕[1] 范镝[1] 郑立功[1] 张峰[1] 张学军[1] 

机构地区：[1]中国科学院长春光机与物理研究所光学技术中心,长春130022

出　　处：《长春理工大学学报（自然科学版）》2006年第4期8-11,共4页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：国家杰出青年基金资助项目(No.69925512)

摘　　要：本文介绍了480mm×280mm的船形碳化硅平面反射镜数控研磨的工艺参数的确定和工艺流程;并介绍了在研磨过程中使用的机床、磨具、磨料及采用的工艺参数和检测方法。给出了研磨前后480mm×280mm的船形碳化硅平面反射镜面形精度和表面粗糙度的检测结果:面形精度峰谷值(PV)由初始的21.7微米收敛到4.62微米,均方根值(RMS)由3.70微米收敛到0.558微米,并把轮廓检测结果与干涉检测结果进行了比较。Computer controlled grinding and testing process of 480mm × 280mm flat silicon carbide （SiC） mirror are mentioned. The machine, tools, abrasives, technique and testing method used in the grinding and testing process are introduced respectively. Also some profiler testing results of surface figure are given. It＇ s shown that the surface figure peak to villy and root - mean - square were reduced from 21.71μm and 3.70μm to 4. 62μm and 0. 558μm respectively. And the interferometric test result is also shown.

关 键 词：碳化硅反射镜 数控研磨 轮廓检测 面形精度 

分 类 号：TQ171.68[化学工程—玻璃工业]