SHS法工艺参数对制备氮化硅粉体的影响  

EFFECT OF SHS PROCESSING PARAMETERS ON PREPARATION OF SILICON NITRIDE POWDER

作　　者：王正军[1] 李金富[2] 燕东明[2] 王拥军[2] 段关文[2] 

机构地区：[1]江苏省宿迁市宿迁学院,宿迁市223800 [2]中国兵器工业第五二研究所,烟台264003

出　　处：《粉末冶金工业》2006年第6期23-26,共4页Powder Metallurgy Industry

基　　金：国家科技攻关计划资助课题(2003DFBA0010)

摘　　要：本文采用自蔓燃高温合成方法（Self—propagating High—temperature Synthesis）简称（SHS）合成氮化硅粉体，借助于XRD、SEM等检测方法，分析了自蔓燃高温合成氮化硅过程中氮气、温度、稀释荆与孔隙率等方面的影响。结果表明：只要最高燃烧温度不高于相应氮气压力下Si3N4的热分解温度，就可以用SHS方法合成Si3N4；氮气压力下硅粉的自蔓燃合成反应，必须要引入Si3N4稀释荆，来控制反应温度，以获得高α相含量的粉体。压坯气孔率控制在30％～70％，否则反应不能进行。研究发现SHS法可以制备纯度较高的氮化硅粉体。此法较传统方法合成的氮化硅设备简单，成本低廉，纯度高，填充性及烧结活性好。Si3N4 powder was prepared by Self-propagating High- temperature Synthesis（SHS） and X - ray diffraction and SEM were used to examine the Si3N4 powder. The effects of following paramers were analysed, such as nitrogen purity and pressure, combustion temperature, diluents content and the porosity of compacts and so on. The experiment results show that the SHS reaction between Si powder and nitrogen can proceed at low nitrogen pressure as long as combustion temperature is lowere than the decomposition temperature of Si3N4. In nitrogen, the diluent shonld be added to control reaction temperature and obtain powder with high a content, the porosity of compacts shonld be controlled in therange of 30 % -- 70 %, otherwise, the SHS is impossible. The results indicate that SHS method can prepare high purity Si3N4 powder. SHS has advantage＂ over traditional technology in simplicity of equipment, low cost and high sintering activity of product.

关 键 词：自蔓燃高温合成 α—Si3N4 Β-SI3N4 

分 类 号：TB39[一般工业技术—材料科学与工程]