Fabrication of 3D structure by combining AFM and chemical etching on crystalline silicon surface  

作　　者：袁福龙 郭永峰 梁迎春 李丽 朱宇君 王岩 

机构地区：[1]Precision Engineering Research Institute, Harbin Institute of Technology [2]School of Chemistry and Material Science, Heilongjiang University

出　　处：《Journal of Harbin Institute of Technology(New Series)》2006年第6期667-670,共4页哈尔滨工业大学学报（英文版）

基　　金：Sponsored by the Natural Science Foundation of China (Grant No.20271019), the Natural Science Foundation of Heilongjiang Province (Grant No.B200504) and the Education Department Foundation of Heilongjiang Province (Grant No.11511270).

摘　　要：AFM is used for forming silicon dioxide as a layer (mask) on the silicon wafer surface (100) during the cutting process in ambient atmosphere. The silicon dioxide is made through reaction of silicon and oxygen in the atmosphere. As a result of the anisotropic behavior of single crystalline silicon, the etching rates in alkaline solution depend greatly on the various crystal orientations. The anisotropic etching behaviors in KOH solution and reasons of crystalline silicon are described. Effect of etching conditions such as etching temperature and KOH concentration of the alkaline solution on height of the micro-protuberances has been described.AFM is used for forming silicon dioxide as a layer （mask） on the silicon wafer surface （100） during the cutting process in ambient atmosphere. The silicon dioxide is made through reaction of silicon and oxygen in the atmosphere. As a result of the anisotropic behavior of single crystalline silicon, the etching rates in alkaline solution depend greatly on the various crystal orientations. The anisotropic etching behaviors in KOH solution and reasons of crystalline silicon are described. Effect of etching conditions such as etching temperature and KOH concentration of the alkaline solution on height of the micro-protuberances has been described.

关 键 词：atomic fore microscope （AFM） micro machining alkaline solution crystalline silicon ANISOTROPY ETCHING 

分 类 号：O643[理学—物理化学]