浸没膜厚度对固体浸没透镜系统分辨力的影响  

The Influence of the Thickness between the Sample and Solid Immersion Lens on the Resolution of Microscopy System

作　　者：施华萍[1] 张耀举[1] 孙策[1] 

机构地区：[1]温州大学物理与电子信息学院,浙江温州325027

出　　处：《激光与红外》2007年第1期72-75,共4页Laser & Infrared

摘　　要：考虑了光在固体浸没透镜(SIL)和观测样品之间的薄膜的厚度效应,应用矢量衍射理论研究了半球形SIL系统的光场分布。分析和计算指出,光斑的强度、边瓣强度和光斑大小随薄膜的厚度发生振荡。当厚度一定时,在样品内表面附近,随着离开界面的距离的增加,光斑大小和边瓣强度基本不变,但光强先增大后减小,焦点略微向样品内迁移。薄膜材料的折射率与SIL的折射率相匹配时成像效果较好、分辨率较高。Considering the effects of the thickness of the film between the solid immersion lens （SIL） and the microscopy sample, the optical field distribution of the SIL system is analyzed using the vector diffraction theory. The analyses and calculations show that the intensity of spot, spot size and sidelobe intensity oscillate with the thickness of the film. When the thickness of the film is given, the spot size and sidelobe intensity is basically unchanged in the vicinity of the sample＇s surface, but the intensity of spot increases at the beginning of increasing the depth into the sample and then decreases. The focus of the system slightly shifts into the sample. It is found that the resolution is higher when the refractive index of gap material matches the SilL＇s refractive index.

关 键 词：半球形固体浸没透镜 衍射 显微 

分 类 号：O438.2[机械工程—光学工程]